Department of Electrical Engineering, University of Washington


Lab Access
Std Op Procedures
Microtech Courses


Electrical Engineering Microfabrication Laboratory

The EE microfabrication laboratory is located in the lower basement of the EE building. Access is via the gowning room B025. The lab consists of a suite of cleanroom laboratories that includes a variety of microfabrication equipment and services, such as lithography, thin film deposition and characterization, and wet etching.

Access to the lab's facilities and equipment is available to all members of the University of Washington, as well as to users from industry. For more information on using the EE Microfabrication Lab, please visit our Lab Access page.


Director: Prof. R. Bruce Darling
Manager: Sarah McQuaide


The UW has another microfabrication lab located at the Washington Technology Center in Fluke Hall, the WTC Mirofabrication Lab.

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