Hello everyone,


Pahnit and I were working with the Oriel 3-in aligner yesterday and had a
few problems with accidental exposure of our wafer and possible safety
hazards to our eyes. Sheng-Hsiung also had problems this week, documented in
the log book.
It seems that when "timer-interrupt" is OFF and then main power is turned
on, exposure happens immediately for some amount of time even if the timing
dials are all set to zero. If the timer interrupt is "ON" when the main
power is turned on, no exposure happens after timing is set and start is
pressed. After discussion with Tai and experimenting with the system this
morning I found that the following settings should be kept constant on the
timer-integrator to avoid accidental exposure:


1. Timer-intergrator main power should be kept "ON" always. (if it is off,
see procedure below).
2. All timing dials set to "zero"
3. Timer-interrupt "OFF"
4. Shutter "AUTO"
5. Remote "TIMER"
6. set time
7. "START"


If timer-integrator main power is off,
1. All timing dials set to "zero"
2. Timer-interrupt "ON"
3. Main power "ON"
4. Timer-interrupt "OFF"
5. set time
6. "START"


If you have any questions please let me know. The procedures above will be
written in the log book at today's date, 7/25/03, for reference.


Cheers,
Sarah