Flexible microprocessing organized by three versatile microrobots under microscopy. Friday, 11:30am EE 303 Ohmi Fuchiwaki, Phd.Student Robotics Division Department of Mechanical Engineering & Intelligent Systems University of Electro-Communications, Tokyo Abstract In this presentation, we describe flexible microprocessing organized by versatile microrobots under microscopes. Versatile microrobots composed of four piezo elements and two electromagnets can move on steel surface with nanometer resolution. And the spherical micro manipulator that the steel ball supported by three piezo actuators are incorporated into the small robot to handle the micro size objects. In the first part of this report, the piezo based micro robot and the spherical micro manipulator are described and these basic performances such as manipulation resolution are checked by the primary experiments. In the next part, it is described that three versatile microrobots are developed and manipulate small objects in cooperation with each other. One microrobot which has a sample stage can transport samples at the microscope focus point precisely. Other two microrobots which have the spherical manipulator can handle small objects accurately. This collaboration of versatile microrobots under microscopes succeeds in providing accurate microprocessing performance with low cost and much of flexibility. Finally as an practical application, it is successfully demonstrated that the insect body are disassembled by these microrobots. Address/Contact University of Electro-Communications, Tokyo Department of Mechanical Engineering & Intelligent Systems 1-5-1, Chofugaoka Chofu, Tokyo 182-8585 Japan Phone: +81-(424)-43-5433(Office) Fax: +81-(424)-84-3327 Email: fuchiwaki@sys.aolab.mce.uec.ac.jp Personal Birthday: Oct. 27 ,1975 Birthplace: Kagoshima, Japan Citizenship: Japan Language: Japanese and English Personal: Single Education 3/1999: B.S. in Applied Physics University of Tsukuba, Ibaraki, Japan 3/2001: M.S. in Mechanical Engineering and Intelligent Systems University of Electro-Communications, Tokyo, Japan 4/2001-present: Phd.Student Department of Mechanical Engineering & Intelligent Systems University of Electro-Communications, Tokyo, Japan (3/2004: Dr.Eng in Mechanical Engineering and Intelligent Systems University of Electro-Communications, Tokyo, Japan) Employment/Experience 4/2003-present: Research Fellow The Japan Society for the Promotion of Science ( J S P S ) 4/2002-3/2003: Research Assistant University of Electro-Communications Research Areas 1. Micro Robotics & Applied System -Micro Actuator and Micro Sensor -Micro and Fine Mechanism 2. Machine Tool and Production System -Metrology for Quality Control -Intelligent Control of Machine Tool 3.Precision Engineering -Micro dynamics and control of Fine Mechanism -Mechanism for Micro Positioning 4.Robotics -Multiple Robotics Navigation -Swarm Technology Research Achievement -3 journal publications -Over 20 conference publications and presentations -1 Japan patent Professional Membership American Society of Precision Engineering (ASPE) Japan Society of Precision Engineering (JSPE) Robotics Society of Japan (RSJ) List of Journal Publications 1)Ohmi Fuchiwaki, Yuuichi Syouji, Trevai Chomuchana and Hisayuki Aoyama: Development of Versatile Micro Robot for Microscopic Operation (1st Report), -Design and Structure and Result of Basic Performance-; Jpn. Soc.of Prec. Engg., Vol.68, No.3, pp.403-407 (2002) 2)Ohmi Fuchiwaki and Hisayuki Aoyama: Micromanipulation by Miniature Robots in a SEM Vacuum Chamber, J.of Robotics and Mechatronics, Vol.14, No.3, pp.221-226(2002) 3)Ohmi FUCHIWAKI, Yuuichi SYOUJI and Hisayuki AOYAMA: Development of Versatile Micro Robot for Microscopic Operation (2nd Report), -Analysis and Experimental Result of Arc Trajectory Motion-; Jpn. Soc. of Prec. Engg.,Vol.69, No.1, pp.69-73 (2003)