This page contains a link to the Photolithography pdf file. It covers
 a history of Photolithography, Wafers, Spin Coating, Prebakes, Exposure
Hardware, Wafer Alignment, and related processing topics.
Safety and issues related to safety are critical in the Microfabrication Lab A few points have to be kept in mind. The chemicals used in photolithography are highly toxic.
Get the Photolithography pdf file
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