EE502: Introduction to MEMS

Course name Introduction to Microelectromechanical Systems (MEMS)
Course number EE502
Cross listings: ME504, others pending
Credit Hours 4
Quarter Offered Autumn
Frequency Annually
Prerequisites Required: none
Recommended: EE527
Course Description MEMS (MicroElectroMechanical Systems) build on the existing silicon processing infrastructure to create micron-scale machines. Unlike conventional integrated circuits, MEMS can have many functions, including sensing, actuation, and communication. This course introduces key topics such as MEMS micromachining techniques, mechanical and electrical design and layout, and discusses specific application examples.
(This course was initially taught as EE539 - Special Topics in EE.)
Laboratory CAD laboratory assignments, one 4 hour cleanroom session.
Keywords MEMS, microfabrication, microsensors, microactuators, transducers.
Web Page
Contact Name: Prof. Karl Böhringer
Department: Electrical Engineering

This course is part of the curriculum in Applied Microtechnology at the University of Washington.

For more information please contact Karl Böhringer (